SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors (original) (raw)

2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME), 2017

Abstract

Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6.

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