Spatially resolved characterization of electromigration-induced plastic deformation in al (0.5wt percent cu) interconnect (original) (raw)

Spatially Resolved Characterization of Electromigration-Induced Plastic Deformation in al (0.5WT% CU) Interconnect

Rozaliya I Barabash

MRS Proceedings, 2002

View PDFchevron_right

Quantitative analysis of dislocation arrangements induced by electromigration in a passivated Al (0.5 wt % Cu) interconnect

Nobumichi Tamura

Journal of Applied Physics, 2003

View PDFchevron_right

Quantitative Characterization of Dislocation Structure coupled with Electromigration in a Passivated Al (0.5 wt% Cu) Interconnects

Nobumichi Tamura

View PDFchevron_right

Plastic deformation in Al (Cu) interconnects stressed by electromigration and studied by synchrotron polychromatic x-ray microdiffraction

Nobumichi Tamura

Journal of Applied Physics, 2008

View PDFchevron_right

Distribution and evolution of plastic deformation in Al (Cu) interconnects stressed by electromigration and studied by synchrotronpolychromatic X-ray microdiffraction

Nobumichi Tamura

2007

View PDFchevron_right

In-situ early stage electromigration study in Al line using synchrotron polychromatic X-ray microdiffraction

Nobumichi Tamura

MRS Proceedings, 2008

View PDFchevron_right

Electromigration-Induced Plastic Deformation in Cu Damascene Interconnect Lines as Revealed by Synchrotron X-Ray Microdiffraction

Arief Budiman

MRS Proceedings, 2006

View PDFchevron_right

Coupling between precipitation and plastic deformation during electromigration in a passivated Al (0.5 wt% Cu) interconnect

Nobumichi Tamura

View PDFchevron_right

Grain-Scale Strain and Orientation Measurements during Electromigration in Al Conductor Lines by Synchrotron X-Ray Microbeam Diffraction

Hongqing Zhang

MRS Proceedings, 2007

View PDFchevron_right

Microstructural and surface effects on electromigration failure mechanism in Cu interconnects

Alexander Palevski

Microelectronics Reliability, 1997

View PDFchevron_right

Crystal plasticity in Cu damascene interconnect lines undergoing electromigration as revealed by synchrotron x-ray microdiffraction

Nobumichi Tamura

Applied Physics Letters, 2006

View PDFchevron_right

Analysis of grain-boundary structure in Al–Cu interconnects

John Sanchez

Journal of Applied Physics, 1997

View PDFchevron_right

X-ray microdiffraction study of Cu interconnects

Zhong-hou Cai

Applied Physics Letters, 2000

View PDFchevron_right

Unexpected Mode of Plastic Deformation in Cu Damascene Lines Undergoing Electromigration

W. Nix

MRS Proceedings, 2004

View PDFchevron_right

Stress‐Induced Anisotropy of Electromigration in Copper Interconnects

Johann Cervenka

2009

View PDFchevron_right

Measurement of strain in Al–Cu interconnect lines with x-ray microdiffraction

Zhong-hou Cai

Journal of Applied Physics, 1999

View PDFchevron_right

Observation and Modelling of Electromigration-Induced Void growth in Al-Based Interconnects

Stefan Bader

MRS Proceedings, 1993

View PDFchevron_right

Simulations of Dislocation Dynamics in Aluminum Interconnects

Erik Van der Giessen

MRS Proceedings, 2002

View PDFchevron_right

Electromigration-induced plastic deformation in passivated metal lines

Alastair MacDowell

Applied Physics Letters, 2002

View PDFchevron_right

Effect of microstructure on electromigration kinetics in Cu lines

Yuri Kaganovskii

Journal of Physics D: Applied Physics, 1998

View PDFchevron_right

Damage mechanics of electromigration in microelectronics copper interconnects

Cemal Basaran

View PDFchevron_right

Investigation of the role of compositional effects on electromigration damage of metallic interconnects

L. Reggiani

Computational Materials Science, 2001

View PDFchevron_right

In situ X-ray Microscopy Studies of Electromigration in Copper Interconnects

Ehrenfried Zschech

View PDFchevron_right

Electromigration Failure Kinetics in Al Alloy Lines: A Microstructure-Based Constitutive Equation

Choong-Un Kim

MRS Proceedings, 1998

View PDFchevron_right

Electromigration failure in ultra-fine copper interconnects

Choong-un Kim

Journal of Electronic Materials, 2003

View PDFchevron_right

Strain-Induced Grain Growth during Rapid Thermal Cycling of Aluminum Interconnects

Roy Geiss

Metallurgical and Materials Transactions A-physical Metallurgy and Materials Science, 2007

View PDFchevron_right

Void nucleation and growth during electromigration in 30 nm wide Cu lines: Impact of different interfaces on failure mode

Kris Vanstreels

2013 IEEE International Interconnect Technology Conference - IITC, 2013

View PDFchevron_right

Dislocation mechanism of interface point defect migration

kedarnath kolluri

2010

View PDFchevron_right

In situ SEM observation of electromigration phenomena in fully embedded copper interconnect structures

Ehrenfried Zschech

Microelectronic Engineering, 2002

View PDFchevron_right