Degradation of TiAlNiAu as ohmic contact metal for GaN HEMTs (original) (raw)

Ti/Al/Ni/Cu Ohmic Contact with Low Contact Resistance and Smooth Surface Morphology for AlGaN/GaN HEMT

Jer-shen Maa

ECS Transactions, 2014

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Stability evaluation of Au-free Ohmic contacts on AlGaN/GaN HEMTs under a constant current stress

Brice de Jaeger

Microelectronics Reliability, 2014

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Temperature dependence of Al/Ti-based Ohmic contact to GaN devices: HEMT and MOSFET

M. Placidi

Microelectronic Engineering, 2011

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Comparison between TiAl and TiAlNiAu ohmic contacts to n-type GaN

S. Trassaert, H. Lahreche

Journal of Electronic Materials, 2000

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Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures

Regina Paszkiewicz

physica status solidi (a), 2016

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Improved Long-Term Thermal Stability At 350°C Of TiB2–Based Ohmic Contacts On AlGaN/GaN High Electron Mobility Transistors

L. Stafford, Amir Dabiran

Journal of Electronic Materials, 2007

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Degradation of 0.25μm GaN HEMTs under high temperature stress test

Martino Lorenzini

Microelectronics Reliability, 2015

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Electrical and Microstructural Characteristics of Ohmic Contacts formation on AlGaN/GaN HEMT

Fatima Romero

2009

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Electrical, microstructural, and thermal stability characteristics of Ta/Ti/Ni/Au contacts to n-GaN

Albert Davydov

Journal of Applied Physics, 2004

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Thermal storage effects on AlGaN/GaN HEMT

Claudio Lanzieri

Microelectronics Reliability, 2008

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Effect of Pt barrier on thermal stability of Ti/Al/Pt/Au in ohmic contact with Si-implanted n-type GaN layers

Chingting Lee

Journal of Electronic Materials, 2001

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Realization of improved metallization-Ti/Al/Ti/W/Au ohmic contacts to n-GaN for high temperature application

Albert Davydov

physica status solidi (c), 2005

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Microstructural properties of thermally stable Ti/W/Au ohmic contacts on n-type GaN

Ramesha Reddy

Microelectronic Engineering, 2006

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Interfacial reactions of Ti/n-GaN contacts at elevated temperature

Albert Davydov

Journal of Applied Physics, 2003

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TEM Assessment of AuTiAlTi and AuPdAlTi Ohmic Contacts to AlGaN/GaN

Michael W Fay

physica status solidi (c), 2003

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Thermal Stability of Nitride-Based Diffusion Barriers for Ohmic Contacts to n-GaN

L. Stafford

Journal of Electronic Materials, 2007

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Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs

Hassan Hirshy

Microelectronics Reliability, 2017

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Investigation of Contact Metal Stacks for Submicron GaN HEMT

Isabel Toledo

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Structural properties of alloyed Ti/Al/Ti/Au and Ti/Al/Mo/Au ohmic contacts to AlGaN/GaN

Alexey Vert

Solid-State Electronics, 2006

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Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN

Vladimir Popok

Journal of Materials Science: Materials in Electronics, 2019

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Degradation characteristics of AlGaN-GaN high electron mobility transistors

Joseph Smart

2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167), 2001

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Study of AlGaN/GaN HEMT degradation through TCAD simulations

Nelson Braga

2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2014

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Formation of thermally stable low-resistance Ti/W/Au ohmic contacts on n-type GaN

Varra Rajagopal Reddy

2005

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AlGaN/GaN HEMT device reliability and degradation evolution: Importance of diffusion processes

Milan Tapajna

Microelectronics Reliability, 2011

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Temperature dependent diffusion and epitaxial behavior of oxidized Au/Ni/p-GaN ohmic contact

Zhenxing Feng

Materials Science and Engineering: B, 2006

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Importance of impurity diffusion for early stage degradation in AlGaN/GaN high electron mobility transistors upon electrical stress

Milan Ťapajna

Applied Physics Letters, 2010

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Ti/Au/Al/Ni/Au low contact resistance and sharp edge acuity for highly scalable AlGaN/GaN HEMTs

Mudassar Meer

IEEE Electron Device Letters, 2018

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Electrical Characteristics of Ti/Al Contacts on AlInN:Mg/GaN Heterostructures

Jae-Hyun Ryou

Japanese Journal of Applied Physics, 2013

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AlN/GaN MOS-HEMTs With Thermally Grown hboxAl2hboxO3\hbox{Al}_{2} \hbox{O}_{3}hboxAl2hboxO3 Passivation

E. Wasige

IEEE Transactions on Electron Devices, 2011

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Characterization of Ohmic contacts on GaN/AlGaN heterostructures

S. Viticoli

Applied Surface Science, 2006

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Non-Arrhenius Degradation of AlGaN/GaN HEMTs Grown on Bulk GaN Substrates

Xing Li

2012

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