Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations (original ) (raw )Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology
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Diamond and Related Materials, 1993
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Jocelyn Achard
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Sobia Sajid
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2019
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Jolanta Klemberg-Sapieha
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1992
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