Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters (original) (raw)

This chapter explores the physical principles and operational parameters of Energy Dispersive X-ray Spectrometry (EDS), focusing on its detection mechanisms using semiconductor detectors like Si and SDD-EDS. Emphasizing practical aspects important for ensuring high-quality measurements, the discussion covers the photon energy measurement process, the role of charge generation, and the significance of sophisticated electronic systems in constructing EDS spectra. The user interface of EDS is described as a simplified interaction with a complex detection system, facilitating a clear understanding of EDS performance.