Fabry–Perot Interferometer Used to Measure Very Low Static Pressure Measurements (original) (raw)
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Novel MEMS Fabry-Perot Interferometric Pressure Sensors
Materials Science Forum, 2010
A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.
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