Bimetallic nanoparticles for optimizing CMOS integrated SnO2 gas sensor devices (original) (raw)

2014 44th European Solid State Device Research Conference (ESSDERC), 2014

Abstract

We present gas sensor devices based on ultrathin SnO2 films, which are integrated on CMOS fabricated micro-hotplate (μhp) chips. Bimetallic nanoparticles (NPs) such as PdAu, PtAu, and PdPt have been synthesized for optimizing the sensing performance of these sensors. We demonstrate that functionalization of nanocrystalline SnO2 gas sensing films with PdAu-NPs leads to a strongly improved sensitivity to the toxic gas carbon monoxide (CO) while the cross sensitivity to humidity is almost completely suppressed. We conclude that specific functionalization of CMOS integrated SnO2 thin film gas sensors with different types of NPs is a powerful strategy towards sensor arrays capable for distinguishing several target gases. Such CMOS integrated arrays are highly promising candidates for realizing smart multi-parameter sensing devices for the consumer market.

Gerald Urban hasn't uploaded this paper.

Let Gerald know you want this paper to be uploaded.

Ask for this paper to be uploaded.