High-confinement SiGe low-loss waveguides for Si-based optoelectronics (original) (raw)

Prospects and challenges for SiGe strained-layer epitaxy

Thomas Pearsall

Thin Solid Films, 1990

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Suppression of structural imperfection in strained Si by utilizing SiGe bulk substrate

Yoshitaro NOSE

Applied Physics Letters, 2006

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Si/Si1-xGex epitaxial layers and superlattices. Growth and structural characteristics

Vladimir Ogenko

Semiconductors

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Strain relaxation in high Ge content SiGe layers deposited on Si

Claudio Ferrari

Journal of Applied Physics, 2010

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High quality strained Si/SiGe substrates for CMOS and optical devices

Lars Nebrich

Microelectronic Engineering, 2005

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Control of strain status in SiGe thin film by epitaxial growth on Si with buried porous layer

Mustapha Lemiti

Applied Physics Letters, 2007

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Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films

P. Fougeres

Applied Surface Science, 2006

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Defects in epitaxial SiGe-alloy layers

A. Larsen

Materials Science and Engineering: B, 2000

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Strain, composition and crystalline perfection in thin SiGe layers studied by Raman spectroscopy

K. Lyutovich, T. S. Perova

Thin Solid Films, 2008

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Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer

papichaya chaisakul

Optics Express, 2015

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Impact of misfit dislocations on wavefront distortion in Si/SiGe/Si optical waveguides

Ilaria Cristiani, Vittorio Degiorgio

Optics Communications, 2009

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Fabrication and evaluation of propagation loss of Si/SiGe/Si photonic-wire waveguides for Si based optical modulator

Takenori Osada

Thin Solid Films, 2014

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Raman amplification and lasing in SiGe waveguides

Ozdal Boyraz, Ricardo Claps

Optics Express, 2005

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A novel three-layer graded SiGe strain relaxed buffer for the high crystal quality and strained Si0.5Ge0.5 layer epitaxial grown

GuiLei Wang

Journal of Materials Science: Materials in Electronics, 2019

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Silicon photonics based on Ge/SiGe quantum well structures

papichaya chaisakul

2015 IEEE 12th International Conference on Group IV Photonics (GFP), 2015

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Ge-Rich Graded-Index SiGe Alloys: Exploring a Versatile Platform for mid-IR Photonics

Joan Manuel Báez Ramírez

2018 20th International Conference on Transparent Optical Networks (ICTON), 2018

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Polarization insensitive Ge-rich silicon germanium waveguides for optical interconnects on silicon

papichaya chaisakul

Integrated Optics: Physics and Simulations III

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Integration of waveguides and photodetectors in SiGe for 1.3 /spl mu/m operation

Erich Kasper

IEEE Photonics Technology Letters, 2000

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Relaxed SiGe buffers with thicknesses below 0.1 μm

F. Ernst, Matthias Bauer

Thin Solid Films, 2000

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Optical transitions in Ge/SiGe multiple quantum wells with Ge-rich barriers

Michele Virgilio, Antonia Neels

Physical Review B, 2008

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Ultra-thin strain relaxed SiGe buffer layers with 40% Ge

Erich Kasper

MRS Proceedings, 2004

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Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

P. Fougeres

Materials Science in Semiconductor Processing

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Growth and characterization of Si/SiGe strained-layer superlattices on bulk single-crystal SiGe and Si substrates

Nelson Rowell

Journal of Crystal Growth, 2003

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Epitaxial growth of Ge and SiGe on Si substrates

A. Larsen

Materials Science in Semiconductor Processing, 2006

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SiGe alloys: growth, properties and applications

Subramanian S Iyer

Applied Surface Science, 1991

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Intense photoluminescence from strained SiGe sub-100 nm wires selectively grown on Si by LPCVD

R. Loo

Applied Surface Science, 1996

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Optical waveguiding in a single-crystal layer of germanium silicon grown on silicon

Fereydoon Namavar

Optics Letters, 1990

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Low loss SiGe graded index waveguides for mid-IR applications

M. Carras, Mickael Brun, Sergio Nicoletti

Optics Express, 2014

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Broadband single mode SiGe graded waveguides with tight mode confinement for mid-infrared photonics

Mumta heenah

2016 Photonics North (PN), 2016

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Critical thickness of strained Si1-xGex on Ge(111) and Ge-on-Si(111)

Mahfuz Alam

Applied Physics Express, 2019

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Optical properties of silicon germanium waveguides at telecommunication wavelengths

Dimitris Syvridis

Optics Express, 2013

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High Ge Content Photodetectors on Thin SiGe Buffers

Erich Kasper, K. Lyutovich, Matthias Bauer

Materials Science and Engineering B

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Mlines characterization of the refractive index profile of SiGe gradient waveguides at 215 µm

Mickael Brun, Sergio Nicoletti

Optics Express, 2013

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Optical anisotropies in strained Si/SiGe systems

Hermann Grimmeiss

Applied Surface Science, 1996

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Optical and material properties of sandwiched Si/SiGe/Si heterostructures

Zhe Feng

Surface and Coatings Technology, 2006

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