Piezoresistive Si MEMS accelerometer with novel nonplanar flexures for low cross axis sensitivity (original) (raw)

2016

Abstract

One of the primary concern in piezoresistive micro accelerometers is their cross axis sensitivity. The most direct approach to solve this problem is by means of electronic bridge configurations, which relies on the difference in stress profiles along different directions. In this paper, a nonplanar dual flexure geometry has been proposed as a scheme for cross axis sensitivity reduction, by the mechanical design itself. The device exhibits a very low cross axis sensitivity of <0.01% in Y direction and <0.05% in X direction while maintaining high prime axis sensitivity of 133μV/Vg. The device also shows very low non linearity (<1%) over a range of 100g acceleration and a resonant frequency of 2.2 kHz.

I R Praveen Krishna hasn't uploaded this paper.

Let I R Praveen know you want this paper to be uploaded.

Ask for this paper to be uploaded.