Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent (original) (raw)

SPIE Proceedings, 1999

Abstract

The aim of this work is to investigate the use of microchannels to concentrate pollutants present in the air. Devices with a length of 30 cm, a width of 100 micrometers and a depth of 30 micrometers , sealed by anodically bonded glass, were manufactured. Tests of adsorption characteristics were made using n-hexane. To reliably insert N2 contaminated with 1000

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