Microanalysis with high Spatial Resolution (original) (raw)

MRS Proceedings, 1983

Abstract

ABSTRACTElemental microanalysis, using x-rays and electron energy loss scattering, has been shown to be possible with electron beam probe sizes down to 0.5nm. This paper will discuss some practical problems, such as specimen drift, signal magnitude, and probe-specimen interaction when the probe is made very small. These problems have arisen in two studies: 1) an investigation of as segregation in poly-crystalline Si and 2) imaging of metal spheres with surface and bulk plasmon inelastic scattering.

Philip Batson hasn't uploaded this paper.

Let Philip know you want this paper to be uploaded.

Ask for this paper to be uploaded.