Structural and optical properties of the SiO2–P2O5 films obtained by sol–gel method (original) (raw)

Thin Solid Films, 2007

Abstract

A comparative study of the sol–gel films prepared in the SiO2–P2O5 system starting with triethylphosphate, triethylphosphite and phosphoric acid as P precursors was performed. The work addresses basic aspects of physics, chemistry, and engineering of oxide films for applications in microelectronics, sensing, nano-photonics, and optoelectronics by establishing the influence of different precursors on the composition, structure and optical properties of

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