New capacitive low-gtriaxial accelerometer with low cross-axis sensitivity (original) (raw)

Journal of Micromechanics and Microengineering, 2010

Abstract

... new in-plane and out-of-plane accelerometer design exhibits high cross-axis sensitivity immunity, high sensitivity and high linearity suggesting that the triaxial accelerometer has the potential for use in future ... A balanced ac modulation voltage, Vm, is imposed across the bridge. ...

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