Issues in path toward integrated acoustic sensor system on chip (original) (raw)

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Issues in path toward integrated acoustic sensor system on chip

2008 IEEE Sensors, 2008

Jen-Yi ChenJen-Yi Chen

Abstract

Abstract—Size and power minimization requirements from portable consumer applications are driving integration of MEMS sensors with integrated circuits. For performance maximization, designers require MEMS device models MEMS that can be co-simulation with interface circuits for ...

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