A New Nano-Probe Using Micro Assembly Transfer (original) (raw)

2006 International Microsystems, Package, Assembly Conference Taiwan, 2006

Abstract

This paper demonstrates a new force sensing nano-probe that allows a cost effective nano-tip to be easily assembly on a tuning fork sensor. By taking advantages of surface micromachined tip fabrication, the subsequent assembly-transfer procedures are able to minimize the mass load effect of a tuning fork based atomic force microscopy (AFM). Furthermore, the micro assembly transfer of nano-probes can

Jen-Yi Chen hasn't uploaded this paper.

Let Jen-Yi know you want this paper to be uploaded.

Ask for this paper to be uploaded.