Ar doping of CH4 plasmas for carbon film deposition (original) (raw)
Influence of bias voltage on the structure and deposition mechanism of diamond-like carbon films produced by RF (13.56 MHz) CH4 plasma
M. Ouchabane
physica status solidi (a), 2010
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Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry
P. Lemoine
Plasma Sources Science and Technology, 2011
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Deposition and properties of diamondlike carbon films produced in microwave and radio‐frequency plasma
Jolanta Klemberg-Sapieha
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1992
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Plasma deposition and etching of diamond‐like carbon films
Moses David
AIChE Journal, 1991
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High density plasma chemical vapor deposition of diamond-like carbon films
Luis Zambom
Microelectronics Journal, 2003
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The electronic structure of carbon films deposited in rf argon–hydrogen plasma
Mariano Anderle
Journal of Electron Spectroscopy and Related Phenomena, 2006
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Spectroscopic Characterization of the Atomic Hydrogen Energies and Densities and Carbon Species during Helium−Hydrogen−Methane Plasma CVD Synthesis of Diamond Films
Paresh Ray
Chemistry of Materials, 2003
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Investigation of radio frequency plasma for the growth of diamond like carbon films
SuSHiL KuMar
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DIAMOND-LIKE CARBON FILMS DEPOSITED BY HYDROCARBON PLASMA SOURCES
Dachamir Hotza
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Influence of CH4 on the morphology of nanocrystalline diamond films deposited by Ar rich microwave plasma
Sobia Sajid
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Fabrication of diamond-like carbon films using pseudo-spark discharge plasma-enhanced chemical vapor deposition method
seiji mukaigawa
Japanese Journal of Applied Physics, 2014
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Formation of Diamond-Like Carbon Films by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition
Taiichi Otsuji
Japanese Journal of Applied Physics, 2013
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Plasma deposited diamondlike carbon on GaAs and InP
Joseph Warner
1984
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Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures
Wolfgang Ensinger
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007
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Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering
Luis Zambom
Thin Solid Films, 2000
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Role of carbon atoms in the remote plasma deposition of hydrogenated amorphous carbon
Richard Engeln
Journal of Applied Physics, 2003
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Mass and optical emission spectroscopy of plasmas for diamond synthesis
Roland Kröger
Pure and Applied Chemistry, 2000
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Evidence of hexagonal diamond in plasma-deposited carbon films
S. Ravi P. Silva
Journal of materials …, 1994
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Plasma deposition of carbon layer: Correlations between plasma parameters, film structure and properties
Patrice Raynaud
Diamond and Related Materials, 2006
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Plasma enhanced chemical vapor deposition of a-C:H films in CH4–CO2 plasma: Gas composition and substrate biasing effects on the film structure and growth process
R. Bartali, Victor Micheli, Gloria Gottardi, Mariano Anderle
Thin Solid Films, 2008
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Electrical properties of diamond-like carbon films grown using ECR plasma decomposition of methane
Mohan Rao Gowravaram
Vacuum, 2004
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Doping of rf plasma deposited diamond-like carbon films
S. Ravi P. Silva
Thin Solid Films, 1995
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R.f. plasma-assisted deposition of diamond-like carbon films from methanol—water vapour mixture
Manoj Komath
Diamond and Related Materials, 1994
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Plasma biasing to control the growth conditions of diamond-like carbon
Andre Anders
Surface and Coatings Technology, 2007
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Characterization of the near-surface gas-phase chemical environment in atmospheric-pressure plasma chemical vapor deposition of diamond
Mark Swihart
Diamond and Related Materials, 1999
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R.f. plasma-assisted chemical vapour deposition of diamond-like carbon: physical and mechanical properties
Doeke Oostra
Thin Solid Films, 1992
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Plasma deposition of carbon films at room temperature from C2H2–Ar mixtures: anodic vs. cathodic films
Pere ROCA i CABARROCAS
Thin Solid Films, 2001
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The influence of substrate emissivity on plasma enhanced CVD of diamond-like carbon films
Lenka Zajíčková
Czechoslovak Journal of Physics, 1999
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Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects
Paolo Tosi
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Spectroscopic Electron Temperature Measurement in Methane/helium Plasma During Diamond-like Carbon Coating
Artit Chingsungnoen
2015
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Role of Hydrogen in Ultrananocrystalline Diamond Deposition From Argon-Rich Microwave Plasmas
Kuen Ting
IEEE Transactions on Plasma Science, 2009
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