Microstructured horizontal alumina pore arrays as growth templates for large area few and single nanowire devices (original) (raw)

2008, physica status solidi (RRL) – Rapid Research Letters

One-dimensional structures have attracted a great interest in the last two decades in broad areas of nanotechnology, such as electronics, sensing, and information technology. For future applications, one of the biggest challenges is their controlled organization on a substrate. An elegant approach is template growth, in which a preexisting structure defines the nanowires geometry. Porous anodic aluminum oxide (AAO) film has attracted much interest due to the high aspect ratio, high degree of ordering, high pore density, uniformity and low cost synthesis . AAO templates are commonly obtained with the pores oriented vertically on a substrate . Unfortunately, this method offers some difficulties for their compatibility with the mainstream Si planar technology. However, a significant advance has been achieved in the last years towards the fabrication of horizontal AAO templates on a chip .