Waveguide based optofluidics (original) (raw)
Related papers
SPIE Proceedings, 2010
Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry-Perot antiresonant cavity. This arrangement allows to realize liquid core waveguides that can be very useful in optofluidic applications. We report the fabrication and the characterization different optofluidic devices based on hollow core ARROW waveguide like tuneable couplers and Mach-Zehnder interferometers. The proposed devices have been realized by silicon technology. The channels have been realized by etching the silicon wafer, while the two claddings have been deposited on both wafers by LPCVD or ALD depositions.
Optofluidics: waveguides and devices
Integrated Optics: Devices, Materials, and Technologies XVI, 2012
In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used in order to realize complex optofluidic devices like Mach-Zehnder interferometers and ring resonators. The advantage of using optofluidic waveguide results in very compact devices with a total length of 2.5 mm and a required liquid volume less then 0.16nl.
Liquid Core ARROW Waveguides: A Promising Photonic Structure for Integrated Optofluidic Microsensors
Micromachines, 2016
In this paper, we introduce a liquid core antiresonant reflecting optical waveguide (ARROW) as a novel optofluidic device that can be used to create innovative and highly functional microsensors. Liquid core ARROWs, with their dual ability to guide the light and the fluids in the same microchannel, have shown great potential as an optofluidic tool for quantitative spectroscopic analysis. ARROWs feature a planar architecture and, hence, are particularly attractive for chip scale integrated system. Step by step, several improvements have been made in recent years towards the implementation of these waveguides in a complete on-chip system for highly-sensitive detection down to the single molecule level. We review applications of liquid ARROWs for fluids sensing and discuss recent results and trends in the developments and applications of liquid ARROW in biomedical and biochemical research. The results outlined show that the strong light matter interaction occurring in the optofluidic channel of an ARROW and the versatility offered by the fabrication methods makes these waveguides a very promising building block for optofluidic sensor development.
Integrated silicon optical sensors based on hollow core waveguide
2007
In this work we show that integrated silicon hollow core AntiResonant Reflecting Optical Waveguide (ARROW) can be used as a basic tool for the realization of optical sensors. ARROW waveguides, with hollow core, permit to confine the light in a low refractive index liquid core, by means of two cladding layers designed to form a high reflectivity Fabry- Perot antiresonant cavity. This arrangement allows to realize microchannels that can simultaneously act as microfluidic networks and optical waveguides with a strong advantage in the integration and with an increased interaction efficiency between the light and the liquid substance that can be very useful in sensing applications (fluorescence, absorption spectroscopy, etc.). Another ARROW waveguides advantage is the ability to tailor the wavelength response of the device. In fact, the waveguide propagation losses strongly depend on the change of the resonant condition inside the interference cladding. In this paper we report three sens...
Design and Optimization of an Optofluidic Ring Resonator Based on Liquid-Core Hybrid ARROWs
IEEE Photonics Journal
In this paper, we present the design and analysis of an integrated optofluidic ring resonator based on liquid-core hybrid polymer-silicon antiresonant reflecting optical waveguide (h-ARROW). We perform a modal analysis of hARROW using the finitedifference method, in order to find the optimized optical configuration, which accomplishes single-mode operation and reduced attenuation losses. An accurate investigation of the bend sections is performed to preserve the single-mode behavior with reduced propagation losses. A hybrid liquid-core multimode interference (MMI) device is used as a coupling element in the ring layout, and three possible MMI configurations are simulated and compared. By properly designing and optimizing each optical element, we demonstrate, by simulations, the possibility to achieve a quality factor up to 4 Â 10 4 with the extinction ratio of about 31 dB. Bulk and surface sensing performances of the device are also simulated and discussed.
Optofluidic waveguides: I. Concepts and implementations
Microfluidics and Nanofluidics, 2007
We review recent developments and current status of liquid-core optical waveguides in optofluidics with emphasis on suitability for creating fully planar optofluidic labs-on-a-chip. In this first of two contributions, we give an overview of the different waveguide types that are being considered for effectively combining micro and nanofluidics with integrated optics. The large number of approaches is separated into conventional index-guided waveguides and more recent implementations using wave interference. The underlying principle for waveguiding and the current status are described for each type. We then focus on reviewing recent work on microfabricated liquid-core antiresonant reflecting optical (ARROW) waveguides, including the development of intersecting 2D waveguide networks and optical fluorescence and Raman detection with planar beam geometry. Single molecule detection capability and addition of electrical control for electrokinetic manipulation and analysis of single bioparticles are demonstrated. The demonstrated performance of liquid-core ARROWs is representative of the potential of integrated waveguides for on-chip detection with ultrahigh sensitivity, and points the way towards the next generation of high-performance, low-cost and portable biomedical instruments.
Optofluidic waveguides: II. Fabrication and structures
Microfluidics and Nanofluidics, 2007
We review fabrication methods and common structures for optofluidic waveguides, defined as structures capable of optical confinement and transmission through fluid filled cores. Cited structures include those based on total internal reflection, metallic coatings, and interference based confinement. Configurations include optical fibers and waveguides fabricated on flat substrates (integrated waveguides). Some examples of optofluidic waveguides that are included in this review are Photonic Crystal Fibers (PCFs) and two-dimensional photonic crystal arrays, Bragg fibers and waveguides, and Anti Resonant Reflecting Optical Waveguides (ARROWs). An emphasis is placed on integrated ARROWs fabricated using a thin-film deposition process, which illustrates how optofluidic waveguides can be combined with other microfluidic elements in the creation of lab-on-a-chip devices.
Hybrid Silicon-PDMS Optofluidic ARROW Waveguide
IEEE Photonics Technology Letters, 2012
A hybrid silicon-poly (dimethysiloxane) (PDMS) liquid core antiresonant reflecting optical waveguide (ARROW) is proposed and analyzed. The waveguide hollow core is defined in the bottom silicon wafer sealed by a top PDMS layer. This configuration permits a strongly simplified fabrication process with respect to conventional full silicon-based ARROW waveguides. Furthermore, the transparent PDMS permits out-of-plane light detection and excitation improving the sensing capability. The numerical simulations and the experimental results show that a low loss liquid core ARROW waveguide with a broadband output transmission spectrum can be achieved.
Liquid Core ARROW Waveguides by Atomic Layer Deposition
IEEE Photonics Technology Letters, 2000
We report on the use of the atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits the deposition of a very conformal sub-100-nm titanium dioxide antiresonant layer. This results in a low loss liquid core ARROW waveguide with a broadband output transmission spectrum. Optical transmitted spectrum from the fabricated structure has been reported, and the measured attenuation losses agree with the theoretical predictions.