Micro Ratcheting Transmission Systems Based on Electrostatic Actuator (original) (raw)

2008 International Symposium on Micro-NanoMechatronics and Human Science, 2008

Abstract

This paper presents design and fabrication of a silicon micro ratcheting transmission system (RTS) that utilizes electrostatic comb-drive actuators to rotate a gear ring (or rotor) through a ratchet mechanism. The rotational actuator is engaged with the gear ring through ratchet teeth at one end, and reciprocally rotates around an elastic point at the other end based on electrostatic force.

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