Development of an Electrostatic Micro Transportation System (MTS) with Strider-like Movement of Micro Carts (original) (raw)

2007, 2007 International Symposium on Micro-NanoMechatronics and Human Science

motors to move a sliding shuttle. In this case, the This paper presents a novel micro transportation driving mechanism requires at least two groups of system (MTS), which can drive micro carts by bidirectional XY actuators which were turned on and off utilizing electrostatic actuator and ratchet at suitable times, alternately holding and driving a mechanism. The micro cart, which has driving-wings shuttle. In another work [5], Fujimasa reported the and anti-reverse-wings attached to its central integrated actuator which was actuated by vibration and 'backbone', is driven by electrostatic actuator