Highly sensitive micro-Hall devices based on Al[sub 0.12]In[sub 0.88]Sb∕InSb heterostructures (original) (raw)
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Journal of Applied Physics, 2009
Further diversification of Hall sensor technology requires development of materials with high electron mobility and an ultrathin conducting layer very close to the material's surface. Here, we describe the magnetoresistive properties of micro-Hall devices fabricated using InAlSb/InAsSb/InAlSb heterostructures where electrical conduction was confined to a 30 nm-InAsSb two-dimensional electron gas layer. The 300 K electron mobility and sheet carrier concentration were 36 500 cm2 V-1 s-1 and 2.5×1011 cm-2, respectively. The maximum current-related sensitivity was 2 750 V A-1 T-1, which was about an order of magnitude greater than AlGaAs/InGaAs pseudomorphic heterostructures devices. Photolithography was used to fabricate 1 μm×1 μm Hall probes, which were installed into a scanning Hall probe microscope and used to image the surface of a hard disk.
Low-frequency noise in AlGaAs/InGaAs/GaAs Hall micromagnetometers
2003
We report on studies aimed at understanding and improving the intrinsic noise of high-performance sensors using a 2D electron gas channel confined by a quantum well in the pseudomorphic AlGaAs/InGaAs/GaAs heterostructure. MIS gated and ungated Hall sensors shaped as a Greek cross with dimensions ranging from 100 mum down to submicrometer range have been investigated. At room temperature the predominant