Nano-Electro-Structural Evolution of Ni-Si Ohmic Contacts to 3C-SiC (original) (raw)
Materials Science Forum, 2009
F. Roccaforte
Filippo Giannazzo
Jean Lorenzzi
Gabriel Ferro
Vito Raineri
Giuseppe Moschetti
Abstract
Abstract This paper reports on the macro-and nanoscale electro-structural evolution, as a function of annealing temperature, of nickel-silicide Ohmic contacts to 3C-SiC, grown on 6H-SiC substrates by a Vapor-Liquid-Solid (VLS) technique. The structural and electrical ...
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