Universal nano-adhesive of PDMS oligomers (original) (raw)
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012
Abstract
A nanopatternable oligomeric PDMS layer has been first reported as a nano-interfacial adhesive for its intrinsic transferability and universal adhesiveness. Utilizing well-established PDMS surface modification and bonding techniques, we have been able to form an irreversible bond between a wide range of substrate pairs, representing ones within and across different material categories, including metals, ceramics, thermoset, and thermoplastic polymers.
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