Hairpin-resonator probe design and measurement considerations (original) (raw)

A hairpin-resonator probe is designed to measure the spatial distribution of the electron density in RF plasmas. An effective simulation procedure with the commercial software simulator Ansoft® High Frequency Structure Simulator 8 in eigen-mode option was applied to evaluate the influence of the resonator structures on the resonance frequency (f v ) 00p and unloaded Q-factor (Q v ) 00p of the resonance modes. Many geometrical constructions were examined and finally, an optimal modification is proposed.