State-Resolved Differential Cross Sections and Silicon Nanostructures Based on Atomic Fluorine Beam (original) (raw)

Abstract

We have developed a new beam source for atomic fluorine, based on thermal dissociation of F2 flowing through single-crystal MgF2 (T. Ericson, K. Copeland, M. Keil, Y. Apelblat, and Y. B. Fan, ``Fluoride Salts as Supersonic Nozzle Materials for Hot Fluorine'', Rev. Sci. Inst. 65, 3587 (1994)) tubes heated to 1100 ^0C. The source yields excellent beam quality (velocity fwhm=13%) and intensity (almost as intense as a He beam!), and is very stable and easy to use. Applications of this source to gas-phase reactive scattering in a crossed-beam experiment with H_2, based on bolometric detection of individual vib-rotational states of HF, (L. J. Rawluk, Y. B. Fan, Y. Apelblat, and M. Keil, ``Differential Cross Sections for Rotationally State--Resolved Inelastic Scattering of HF by Ar'', J. Chem. Phys. 94, 4205 (1991)) will be discussed. Modelling results for these experiments using exact quantum chemical dynamics will be presented. Finally, we will discuss applications for su...

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