SIMS-analysis on B, N, and C containing layers (original) (raw)
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Introduction to B–C–N Materials
B–C–N is an emerging material system consisting of novel nanostructures of boron (B), carbon (C), boron nitride (BN), carbon nitride (CNx ), boron-carbon nitride (Bx Cy Nz ), and boron carbide (Bx Cy ). These B–C–N materials are sometimes called as frontier carbon materials, because of their flexibility in forming materials of various types of hybridizations similar to those in the pure carbon system. This chapter provides a concise introduction on all these materials. Readers are referred to various references and other chapters compiled in this book for further reading.
Structural evolution of boron nitride films grown on diamond buffer-layers
Thin Solid Films, 2006
Boron nitride films on diamond buffer layers of varying grain size, surface roughness and crystallinity are deposited by the reaction of B 2 H 6 and NH 3 in a mixture of H 2 and Ar via microwave plasma-assisted chemical vapor deposition. Various forms of boron nitride, including amorphous α-BN, hexagonal h-BN, turbostratic t-BN, rhombohedral r-BN, explosion E-BN, wurzitic w-BN and cubic c-BN, are detected in the BN films grown on different diamond buffer layers at varying distances from the interface of diamond and BN layers. The c-BN content in the BN films is inversely proportional to the surface roughness of the diamond buffer layers. Cubic boron nitride can directly grow on smooth nanocrystalline diamond films, while precursor layers consisting of various sp 2-bonded BN phases are formed prior to the growth of c-BN film on rough microcrystalline diamond films.
Synthesis of Hexagonal Boron Carbonitride without Nitrogen Void Defects
Materials Sciences and Applications, 2015
The synthesis and structure of hexagonal boron carbonitride (h-BCN) film on polycrystalline diamond surface were reported. Polycrystalline diamond and/or diamond-like carbon were first fabricated on Si (100) and then diamond like carbon was used as substrate. The deposition was performed by radio frequency plasma enhanced chemical vapor deposition. In order to reduce the content of nitrogen void defects, the deposition was performed at the high temperature of 950˚C under the working pressure of 2.6 Pa. The typical sample with atomic composition of B 31 C 37 N 26 O 6 in the h-BCN lattice was characterized by X-ray photoelectron spectroscopy. The fine structure of the film was studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The B K-edge and N K-edge of NEXAFS spectra revealed that the synthesized h-BCN film had the ideal honeycomb-like BN 3 configuration without nitrogen void defects.
Carbon, 2000
Submicronic powders containing carbon, boron and nitrogen have been prepared by thermal chemical vapour deposition. The precursors of carbon, boron and nitrogen are acetylene, boron trichloride and ammonia, respectively. Hydrogen is the carrier gas. The conditions of preparation of these powders are rather different from those of thin films containing the same elements. Using X-ray photoelectron spectroscopy and transmission electron microscopy, both chemical analysis and microtexture are studied. It is shown that ex-acetylene carbon blacks with a concentric 'onion-like' texture, quasi stoichiometric boron nitrides with a platelet texture, boron-carbon solid solutions with a low boron content (3-19 at.%) and boron carbonitride powders with either carbon or boron and nitrogen excesses have been prepared.
Boron and Boron Carbide Materials: Nanostructures and Crystalline Solids
B-C-N Nanotubes and Related Nanostructures, 2009
Owing to the rapid developments related to the novel B x C y N z ternary structures, the pedagogical review chapter has several antecedents as new results have emerged. Specifically, we will focus on the B x C y (with x , y = 0-1) hybrid material where the qualitative trend, in general, can be described by the ratio of its constituents. There is, however, a significant asymmetric popularity between the boron and carbon in the scientific literature. Carbon-based structures are well studied compared with boron-based structures. Consequently, understanding of the role played by boron in the formation of the B x C y hybrid structures remains somewhat incomplete. We, therefore, devote a substantial part of discussion on the boron-related structures with an aim to achieve the goal of a complete understanding of the physics and chemistry of the hybrid B x C y material.
Journal of Applied …, 2011
In this study, we implanted N þ and N þ 2 ions into sputter deposited amorphous boron carbide (a-BC) and diamond like carbon (DLC) thin films in an effort to understand the chemical bonding involved and investigate possible phase separation routes in boron carbon nitride (BCN) films. In addition, we investigated the effect of implanted C þ ions in sputter deposited amorphous boron nitride (a-BN) films. Implanted ion energies for all ion species were set at 40 KeV. Implanted films were then analyzed using x-ray photoelectron spectroscopy (XPS). The changes in the chemical composition and bonding chemistry due to ion-implantation were examined at different depths of the films using sequential ion-beam etching and high resolution XPS analysis cycles. A comparative analysis has been made with the results from sputter deposited BCN films suggesting that implanted nitrogen and carbon atoms behaved very similar to nitrogen and carbon atoms in sputter deposited BCN films. We found that implanted nitrogen atoms would prefer bonding to carbon atoms in the films only if there is no boron atom in the vicinity or after all available boron atoms have been saturated with nitrogen. Implanted carbon atoms also preferred to either bond with available boron atoms or, more likely bonded with other implanted carbon atoms. These results were also supported by ab-initio density functional theory calculations which indicated that carbon-carbon bonds were energetically preferable to carbon-boron and carbon-nitrogen bonds. V
Adsorption of Growth Species on the c-BN(100) Surface
The Journal of Physical Chemistry C, 2011
Boron nitride (BN) is a binary chemical compound which is isoelectronic to a similarly structured carbon lattice. 1 BN therefore exists in various carbon-like crystalline phases. The two main phases are the diamond-like sp 3 hybridized cubic phase (c-BN) and the graphite-like sp 2 hybridized hexagonal phase (h-BN) (Figure 1). 2,3 The hexagonal phase is the thermodynamically stable phase under normal laboratory conditions. It changes into the cubic phase at 6 GPa and 2000°C. This cubic phase has several outstanding physical and chemical properties, e.g., extreme hardness (second only to diamond), low density (3.48 g/cm 3), high thermal conductivity (13 W/(cm K) at T = 300 K), high electrical resistivity (10 16 Ω cm), wide band gap (6 À 6.4 eV, the largest among all IV and IIIÀV materials), high chemical stability, and transparency from near-ultraviolet to infrared (η = 2.1 for λ = 600 nm). 4,5 Furthermore, it possesses a high thermal stability, both in oxidizing environments (up to 1300°C) and in contact with Fe, Co, and Ni. It is therefore promising as a tool coating for machining of steel, cast iron, and ferrous alloys. It can also be made as both p-and n-type semiconductors, suitable for p-n junction diodes. These properties make c-BN an extremely promising multifunctional material, which could be tailored for a very large range of advanced mechanical, tribological, thermal, electronic, and optical applications. However, to exploit these applications, a successful route for large area chemical vapor deposition (CVD) of c-BN films is required. In CVD of c-BN, a dilute gaseous mixture of Band N-containing growth species, in an excess of H 2 and/or F 2 , is being introduced into a reactor (Figure 2). 6 In the vicinity of a substrate surface, the reactants will be decomposed by using, for instance, a plasma. 7 The decomposed growth species will then deposit as a c-BN film onto the substrate. The role of the H and/or F species
On the nature of boron-carbon-nitrogen compounds synthesised from organic precursors
Journal of Alloys and Compounds, 1995
Three compounds were prepared through pyrolysis of organic precursors, namely pyridine-borane, piperazine-borane. poly(acrylonitrile)-BC13, following the routes proposed in the literature for the synthesis of single-phase boron carbonitrides of various compositions. X-ray diffraction and MAS NMR studies performed on the powders obtained suggest that the resulting compounds are mixtures of amorphous boron and turbostratically distorted hexagonal boron nitride and graphite rather than substitutional solid solutions of all three elements in a honeycomb network, as was claimed previously. Such a conclusion is also consistent with the results of the XRD investigation of the samples after subsequent heat treatment at 1800-2000°C in argon and in nitrogen of atmospheric pressure.