Elemental analysis of residual deposits in an ion implanter using IBA techniques (original) (raw)

SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02, 2002

Abstract

... J. Mefo, K. J Kirkby, BJ Sealy, G. Boudreault, C. Jeynes School of Electronics and Physical Sciences University of Surrey, Guildford, Surrey, GU2 7XH. ... The flakes were approximately 100 microns thick and appeared silvery on one side but had a dark matt finish on the other. ...

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