3D Printed Bio-inspired Angular Acceleration Sensor (original) (raw)
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2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2021
In this paper, we introduce the development of a bio-inspired system that mimics the angular acceleration sensor function provided by the vestibular system. The prototype is made of a Plexiglas piece that presents the pattern of a semicircular canal at scale 10, with a simplified geometry. A flexible piezoresistive cantilever integrated on polyimide substrate is used to model the electro-mechanical transduction of the cupula/hair cells system. The electro-mechanical response of the complete system is analyzed when submitted to both pulse and sine rotational excitations. It is demonstrated that the biomimetic system only responds to one rotational axis, and is also sensitive to the rotational direction. We also validate that the prototype actually responds to the expected medium vestibular frequencies (from 0.16Hz to 0.64Hz).
Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses
Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses, 2014
This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today’s state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation.
Bio-inspired fluidic thermal angular accelerometer
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016
Highlights Demonstration of angular acceleration sensor mimicking the mammalian semicircular canals with thermal transduction principle and simple two-mask fabrication process. Suppression of undesired linear acceleration signals even in the presence of buoyancy effects stemming from the locally heated fluid by proper arrangement of the resistive temperature sensors of multiple linear, thermal flow sensors in a Wheatstone bridge arrangement.
Bio-Inspired Inertial Sensors for Human Body Motion Measurement
The inertial sensing technologies, including accelerometers and gyroscopes, have demonstrated invaluable importance in clinical practices. They allow a precise measurement of human beings' motion behavior, having built the foundation of gait analysis, monitoring of physical activities, and prosthesis of human balance disorders.
A Low-Cost Inertial Sensor Based on Shaped Magnetic Fluids
IEEE Transactions on Instrumentation and Measurement, 2000
In this paper, an inertial sensor exploiting the effect of external stimuli on a ferrofluid spike is presented. The device consists of a glass pipe filled with water where a mass of ferrofluid is fixed to the pipe wall and spike shaped by a suitable magneticfield configuration. An external perturbation will produce a movement of the spike free end, which is sensed via an infrared readout strategy. A theoretical analysis of the sensing methodology is performed, along with experiments on a laboratory-scale prototype confirming the expected behavior of the device.
Capacitive Bio-Inspired Flow Sensing Cupula
Sensors
Submersible robotics have improved in efficiency and versatility by incorporating features found in aquatic life, ranging from thunniform kinematics to shark skin textures. To fully realize these benefits, sensor systems must be incorporated to aid in object detection and navigation through complex flows. Again, inspiration can be taken from biology, drawing on the lateral line sensor systems and neuromast structures found on fish. To maintain a truly soft-bodied robot, a man-made flow sensor must be developed that is entirely complaint, introducing no rigidity to the artificial “skin.” We present a capacitive cupula inspired by superficial neuromasts. Fabricated via lost wax methods and vacuum injection, our 5 mm tall device exhibits a sensitivity of 0.5 pF/mm (capacitance versus tip deflection) and consists of room temperature liquid metal plates embedded in a soft silicone body. In contrast to existing capacitive examples, our sensor incorporates the transducers into the cupula i...
Journal of The Royal Society Interface, 2015
Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow 'vision' and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization of their unique flow-sensing roles. Our MEMS flow sensors feature a stereolithographically fabricated polymer hair cell mounted on Pb(Zr(0.52)Ti(0.48))O3 micro-diaphragm with floating bottom electrode. Canal-inspired versions are developed by mounting a polymer canal with pores that guide external flows to the hair cells embedded in the canal. Experimental results conducted employing our MEMS artificial superficial neuromasts (SNs) demonstrated a high sensitivity and very low threshold detection limit of 22 mV/(mm s(-1)) and 8.2 µm s(-1), respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles.
A magnetic nanocomposite for biomimetic flow sensing
Lab Chip, 2014
A magnetic nanocomposite has been implemented as artificial hair on a giant magnetoimpedance (GMI) thin-film sensor for flow sensing. The 500 μm long and 100 μm in diameter pillars are composed of iron nanowires incorporated in polydimethylsiloxane (PDMS). The nanowires' length and diameter are 6 μm and 35 nm, respectively. Upon fluid flow, the pillars are deflected, causing a change in the magnetic field at the GMI element and a corresponding change in impedance. The permanent magnetic behavior of the nanowires in combination with the GMI sensor and the high elasticity of the PDMS pillars result in a highperformance flow sensor with low power consumption and potential for remote detection. No additional magnetic field is required to magnetize the nanowires or bias the sensor, which simplifies miniaturization and integration in microsystems. At a power consumption of 31.6 μW, air flow rates up to 190 mm s −1 can be detected with a sensitivity of 24 mΩ (mm) −1 s and a resolution of 0.56 mm s −1 while the range for water flow is up to 7.8 mm s −1 with a sensitivity of 0.9 Ω (mm) −1 s and a resolution of 15 μm s −1 . When power consumption is reduced to as low as 80 nW a high resolution of 32 μm s −1 is still maintained.