2D fluid approaches of DC magnetron discharge (original) (raw)

Two-dimensional fluid approach to the dc magnetron discharge

Luis Marques

Plasma Sources Science & Technology, 2005

View PDFchevron_right

Model of energetic electron transport in magnetron discharges

Matthew Goeckner

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1990

View PDFchevron_right

Two-dimensional Fluid Model of DC and RF Plasma Discharges in Magnetic Field

Subrata Roy

36th AIAA Plasmadynamics and Lasers Conference, 2005

View PDFchevron_right

Two-dimensional fluid simulation of electronegative discharge plasmas

Tae Hun Chung

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science

View PDFchevron_right

A study of the DC discharge in a cylindrical magnetron comparison of experiment and a pic model

Milan Tichy

Czechoslovak Journal of Physics, 2000

View PDFchevron_right

Modeling and Diagnostic of the Plasma of Magnetic Field Supported Discharges

Milan Tichy

Contributions to Plasma Physics, 2005

View PDFchevron_right

A hybrid model for particle transport and electron energy distributions in positive column electrical discharges using equivalent species transport

Fred Huang

Journal of Applied Physics, 1995

View PDFchevron_right

Electric discharge fluid modelling with the contribution of convective and drift energy effects

kamel charrada

The European Physical Journal Applied Physics, 2005

View PDFchevron_right

A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

E. Passoth

… journal of physics, 1999

View PDFchevron_right

2-D Experimental Study of the Plasma Parameter Variations of the Magnetically Sustained DC Discharge in Cylindrical Symmetry in Argon

Marek Tichý

Contributions To Plasma Physics, 2004

View PDFchevron_right

Multidimensional hydrodynamic plasma-wall model for collisional plasma discharges with and without magnetic-field effects

Subrata Roy

Physics of Plasmas, 2005

View PDFchevron_right

Simplified model for the DC planar magnetron discharge

Wilmert De Bosscher

Vacuum, 2004

View PDFchevron_right

Modelling of discharges and non-thermal plasmas—applications to plasma processing

Jean-Pierre Boeuf

1993

View PDFchevron_right

A diffusion-controlled regime of cylindrical inductive discharges

A. Shivarova

Plasma Sources Science and Technology, 2006

View PDFchevron_right

Simulation of electron kinetics in gas discharges

Vladimir Kolobov

IEEE Transactions on Plasma Science, 2006

View PDFchevron_right

Magnetic field effects on gas discharge plasmas

Valery Godyak

Physics of Plasmas, 2006

View PDFchevron_right

A numerical study of planar discharge motion

Fayssal Benkhaldoun

View PDFchevron_right

Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges

Guangye Chen

View PDFchevron_right

Spatially averaged model of complex-plasma discharge with self-consistent electron energy distribution

I. Denysenko

Physical Review E, 2004

View PDFchevron_right

Two-dimensional fluid model of a two-chamber plasma source

A. Shivarova

Plasma Sources Science and Technology, 2008

View PDFchevron_right

Boltzmann equation and particle-fluid hybrid modelling of a hollow cathode discharge

Zoltan Donko

The European Physical Journal Applied Physics, 2007

View PDFchevron_right

Electron Kinetics in a Positive Column of AC Discharges in a Dynamic Regime

Vladimir Kolobov

arXiv (Cornell University), 2023

View PDFchevron_right

1-D DSMC of Electron Kinetics in a Parallel Plate Magnetron Ar Discharge

Mario Pinheiro

View PDFchevron_right

Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

Stéphane Lucas

Journal of Vacuum Science & Technology A, 2019

View PDFchevron_right

Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Jeon Han

Journal of Applied Physics, 2005

View PDFchevron_right

Particle in cell modelling of the observed modes of a dc wire discharge

Denis Packan

Journal of Physics D: Applied Physics, 2010

View PDFchevron_right

Substantiation of the two-temperature kinetic model by comparing calculations within the kinetic and fluid models of the positive column plasma of a dc oxygen discharge

Vladimir Kolobov

Technical Physics, 2003

View PDFchevron_right

Study of electron energy distribution function and transport parameters for CF4 and Ar gases discharge by using the solution of Boltzmann equation-Part I

bahaa T. Chiad

Iraqi Journal of Physics, 2010

View PDFchevron_right

On the Secondary Electron Emission in DC Magnetron Discharge

G. Popa

View PDFchevron_right

Boltzmann Equation Analysis of Electron Transport in a N 2 –O 2 Streamer Discharge

Zoran Petrović

Japanese Journal of Applied Physics, 2011

View PDFchevron_right

Three-dimensional modeling of energy transport in a gliding arc discharge in argon

Stanimir Kolev

Plasma Sources Science and Technology, 2018

View PDFchevron_right

Application of a two-dimensional model in the simulation of an analytical inductively coupled plasma discharge

Ramon Barnes

Spectrochimica Acta Part B: Atomic Spectroscopy, 1989

View PDFchevron_right

Numerical Modeling of the Dielectric Barrier Discharges Plasma Flow

Jane Labadin

2010

View PDFchevron_right