Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering (original) (raw)

Materials Science Forum, 2001

Abstract

All rights reserved. No part of contents of this paper may be reproduced or transmitted in any form or by any means without the written permission of TTP, www.ttp.net. (ID: 66.249.71.102-05/05/12,18:10:25) ... 192 Silicon Carbide and Related Materials 2000 ... 194 Silicon Carbide and Related Materials 2000 ... Silicon Carbide and Related Materials 2000 10.4028/www.scientific.net/MSF.353-356 ... Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron

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