Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor (original) (raw)

Microelectronics Reliability, 2005

Abstract

... Martin Lemberger a , Corresponding Author Contact Information , E-mail The Corresponding Author , Albena Paskaleva b , Stefan Zürcher c , Anton J. Bauer b , Lothar Frey a , b and Heiner Ryssel a , b. ... (c) Fowler–Nordheim plot of obtained J–V traces. ...

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