Arrays of cricket-inspired sensory hairs with capacitive motion detection (original) (raw)

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., 2005

Abstract

This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The

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