Stress and anisotropy effects in the interfacial reactions of Al and TiNx (original) (raw)

Thin Solid Films, 1993

Abstract

... 2 M. Wittmer, J. Vac. Sci. Technol. A, 2 (1984) 273. 3 H. Norstrom, T. Donchev, M. Ostling, and CS Pettersson, Phys. Scri., 28 (1983) 633. ... Sci. Technol. A 2 (1984), p. 273. Full Text via CrossRef. 3H. Norstrom, T. Donchev, M. Ostling and CS Petterson, Phys. Scri. 28 (1983), p. 633. ...

Reuven Brener hasn't uploaded this paper.

Let Reuven know you want this paper to be uploaded.

Ask for this paper to be uploaded.