Thickness measurement of semiconductor thin films by energy dispersive X-ray fluorescence benchtop instrumentation: Application to GaN epilayers grown by … (original) (raw)

Thickness measurement of semiconductor thin films by energy dispersive X-ray fluorescence benchtop instrumentation: Application to GaN epilayers grown by molecular beam epitaxy

Jose Ibañez

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X-ray absorption spectroscopy in the analysis of GaN thin films

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Richard Matyi

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Michael Bedzyk

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Rozaliya I Barabash

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X-ray analysis of the texture of heteroepitaxial gallium nitride films

Nikolaus Herres

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Control of crystallinity of GaN grown on sapphire substrate by metalorganic vapor phase epitaxy using in situ X-ray diffraction monitoring method

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Influence of the deposition parameters of nucleation layer on the properties of thick gallium nitride layers

Regina Paszkiewicz

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Rapid and accurate measurement of the thickness of thin films by an x-ray fluorescence technique using a new background subtraction method

Giovanni E. Gigante

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The electrical, optical, and structural properties of GaN epitaxial layers grown on Si(111) substrate with interlayers

Özgür Duygulu

2009

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Photoreflectance investigations of GaN epitaxial layers

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Detecting minute amounts of nitrogen in GaNAs thin films using STEM and CBED

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Strain and crystalline defects in epitaxial GaN layers studied by high-resolution X-ray diffraction

Rosa Chierchia

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X-ray diffraction studies of epitaxial laterally overgrown (ELOG) GaN layers on sapphire substrates

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Optical spectroscopic investigation of m-plane GaN thin films

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Microstructure, growth mechanisms and electro-optical properties of heteroepitaxial GaN layers on sapphire (0001) substrates

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The Growth Kinetics and Surface Morphology of GaN Epitaxial Layers on Sapphire

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Near edge x-ray absorption fine structure characterization of polycrystalline GaN grown by nitridation of GaAs (001)

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GaN epitaxial layers on inhomogeneous buffer layer: electrical and optical properties

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