Heat balance during plasma immersion ion implantation (original) (raw)

Heat balance during plasma immersion ion implantation

Plasma Sources Science and Technology

Abstract

... This method combines the advantages of plasma treatments, like plasma nitriding [4] and ionimplantation [5], in one method: the modification of complex ... Only the upper 50 mm were made of conducting titanium, the lower part consisted of insulating alumina to reduce the total ...

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