Electrical Breakdown Response for Multiple-Gap MEMS Structures (original) (raw)

2006 IEEE International Reliability Physics Symposium Proceedings, 2006

A. Talin

Jack Skinner

Paul Dentinger

Norman Tien

Abstract

Abstract— We characterize the electrical breakdown response for planar structures, fabricated using microelectromechanical systems (MEMS) methods and materials, to enable design of high voltage microswitches. Electrode configurations that use multiple air gaps provide voltage ...

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