Design of microsensor for gases and liquids flow measurements (original) (raw)

Abstract

In this work we propose a new thermal microsensor for gases and liquids flow measurements that is being implemented by using Micro-Electro-Mechanical-Systems technology. This device measures flow based on calorimetric and time-of-flight principles with six freestanding microfilaments working as thermoresistive elements. The fabrication sequence and layout of the sensor are described and initial results of dynamic simulations are presented. A good qualitative agreement is observed in comparison with the results obtained with an analytical model. q

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References (8)

  1. T.S.J. Lammerink, N. Tas, R.M. Elwenspoek, J.H.J. Fluitman, Micro liquid flow sensor, Sens. Actuators A 37/38 (1993) 45-50.
  2. L. Qio, S. Hein, E. Obermeier, A. Schubert, Micro-gas-flow sensor with integrated heat sink and flow guide, Sens. Actuators A 54 (1996) 547-551.
  3. G. Bedo ¨, H. Fannasch, R. Mu ¨ller, A silicon flow sensor for gases and liquids using AC measurements, Sens. Actuators A 85 (2000) 124-132.
  4. M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang, Thermal flow sensor for liquids and gases based on combinations of two principles, Sens. Actuators A 73 (1999) 7-13.
  5. R.J. Rodrigues, R. Furlan, Microsensor for Liquid flow measurements, Proceedings of the 15th International Conference on Microelectronics and Packaging, 2000, pp. 390-393
  6. R.J. Rodrigues, R. Furlan, Development of a Time-of-Flight flow microsensor, Proceedings of 17th Symposium on Microelectronics Technology and Devices, 2002, pp. 328-333
  7. J. van Kuijk, T.S.J. Lammerink, H.E. de Bree, M. Elwenspoek, J.H.J. Fluitman, Multi-parameter detection in fluid flows, Sens. Actuators A 46/47 (1999) 369-372.
  8. Fig. 6. Delay times as a function of flow velocities for water flow.