Aerosol dynamics modeling of silicon nanoparticle formation during silane pyrolysis: a comparison of three solution methods (original) (raw)

A numerical model has been developed to predict gas-phase nucleation, growth, and coagulation of silicon nanoparticles formed during thermal decomposition of silane. A detailed chemical kinetic model of particle nucleation was coupled to an aerosol dynamics model that includes particle growth by surface reactions, coagulation with instantaneous coalescence, and convective transport. Solution of the aerosol general dynamic equation was handled by three approaches: (1) the e cient and reasonably accurate method of moments;