Optimization of geometric characteristics to improve sensing performance of MEMS piezoresistive strain sensors (original) (raw)

Journal of Micromechanics and Microengineering, 2010

Abstract

In this paper, the design of MEMS piezoresistive strain sensor is described. ANSYS®, finite element analysis (FEA) software, was used as a tool to model the performance of the silicon-based sensor. The incorporation of stress concentration regions (SCRs), to localize stresses, was explored in detail. This methodology employs the structural design of the sensor silicon carrier. Therefore, the induced strain

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