Investigating the Reliability of Electrostatic Comb-Drive Actuators Utilized in Microfluidic and Space systems Using Finite Element Analysis (original) (raw)

Abstract

This study focuses on investigating the design parameters of lateral Electrostatic Comb-Drive actuators, where the effect of these parameters on the actuation performance is explored using Finite Element Analysis (FEA). This level of analysis is essential to the design process of system-on-a-chip MEMS applications, where a Comb-Drive can represent the main source of actuation within the chip system. Of particular interest to this study, is the application of the electrostatic Comb- Drive motor as a fluidic pump in on-a-chip systems used for drug delivery or in cooling of microprocessors used in space vehicles. The commercial FE package ANSYS is utilized to construct a robust comb-drive model and solve its multiphysics interaction problem using the Direct Coupled-Field Analysis. In this model, the thickness, gab and overlap between the Comb fingers are varied. The design of this model is also modulated to account for the change in the number of Comb fingers and the applied driving vo...

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