Characterization of ZnO/diamond SAW devices elaborated on the smooth nucleation side of MPACVD diamond (original) (raw)

Abstract

We designed a SAW filter in this work by combining the piezoelectric ZnO film with a freestanding double layer diamond film deposited using CH 4 − H 2 pulsed MPACVD process through two growth stages. The AFM measurements on the nucleation side of the diamond film has shown that this side is smooth enough to perform photolithography process in the SAW device elaboration, while the good quality of the diamond film produced on this side has been confirmed through Raman spectroscopy.

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