Microfabricated Optical Chopper (original) (raw)

Spie Milestone Series, 1999

Abstract

ABSTRACT A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electrostatically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable deflection amplitudes of 400 micrometers . Further optimizations of the design are discussed.

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