Planar waveguides with less than 01 dB/m propagation loss fabricated with wafer bonding (original) (raw)

We demonstrate a wafer-bonded silica-on-silicon planar waveguide platform with record low total propagation loss of (0.045 ± 0.04) dB/m near the free space wavelength of 1580 nm. Using coherent optical frequency domain reflectometry, we characterize the group index, fiber-to-chip coupling loss, critical bend radius, and propagation loss of these waveguides. lea , . ohne, . ohrich, . Selle, and M. ern nde , om osition and o tical ro erties o silicon oxynitride ilms de osited by electron cyclotron resonance," Vacuum 67, 507-512 (2002). 20. B. J. Soller, D. K. Gifford, M. S. Wolfe, and M. E. Froggatt, "High resolution optical frequency domain reflectometry for characterization of components and assemblies," Opt. Express 13, 666-674 (2005). 21. U. Glombitza and E. Brinkmeyer, "Coherent Frequency-Domain Reflectometry for Characterization of Single-Mode Integrated-Optical Waveguides,"