Impact of seed layer on material quality of epitaxial germanium on silicon deposited by low pressure chemical vapor deposition (original) (raw)
Epitaxial growth of Ge on a thin SiO2 layer by ultrahigh vacuum chemical vapor deposition
Davide Cammilleri
Journal of Crystal Growth, 2007
View PDFchevron_right
Comparative Studies of the Growth and Characterization of Germanium Epitaxial Film on Silicon (001) with 0° and 6° Offcut
Eugene Fitzgerald
Journal of Electronic Materials, 2013
View PDFchevron_right
High quality Ge epitaxial layers on Si by ultrahigh vacuum chemical vapor deposition
Gun-do Lee
Thin Solid Films, 2009
View PDFchevron_right
Impacts of doping on epitaxial germanium thin film quality and Si-Ge interdiffusion
Guangnan Zhou
Optical Materials Express, 2018
View PDFchevron_right
Growth, structural, and electrical properties of germanium-on-silicon heterostructure by molecular beam epitaxy
Mantu Hudait
AIP Advances, 2017
View PDFchevron_right
Facile Chemical Solution Deposition of High-Mobility Epitaxial Germanium Films on Silicon
Baoquan Sun
Angewandte Chemie International Edition, 2010
View PDFchevron_right
Reduced-Pressure Chemical Vapor Deposition of Epitaxial Ge Films on Si(001) Substrates Using GeCl[sub 4]
Anthony Lochtefeld
Electrochemical and Solid-State Letters, 2007
View PDFchevron_right
Low-Temperature Hetero-Epitaxial Growth of Ge on Si by High Density Plasma Chemical Vapor Deposition
Jason Verley
MRS Proceedings, 2006
View PDFchevron_right
High quality relaxed germanium layers grown on (110) and (111) silicon substrates with reduced stacking fault formation
Văn Hướng Nguyễn
Journal of Applied Physics, 2013
View PDFchevron_right
Lateral epitaxial growth of germanium on silicon oxide
Luca Ortolani
Applied Physics Letters, 2008
View PDFchevron_right
Epitaxial growth of Ge and SiGe on Si substrates
A. Larsen
Materials Science in Semiconductor Processing, 2006
View PDFchevron_right
Kinetics of Si incorporation into a Ge matrix for Si[sub 1−x]Ge[sub x] layers grown by chemical vapor deposition
Matthias Bauer
Journal of Applied Physics, 2006
View PDFchevron_right
Low temperature growth of the epitaxial Ge layers on Si(100) by Hot Wire Chemical Vapor Deposition
Aleksey Nezhdanov
Journal of Physics: Conference Series, 2014
View PDFchevron_right
Low-pressure CVD of Germanium-Silicon films using silane and germane sources
Alexey Kovalgin
2001
View PDFchevron_right
On the relation between low-temperature epitaxial growth conditions and the surface morphology of epitaxial Si and Si1−xGex layers, grown in an ultrahigh vacuum, very low pressure chemical vapour deposition reactor
Jan Vanhellemont, J. Poortmans
Thin Solid Films, 1994
View PDFchevron_right
Epitaxial growth of germanium on silicon using a Gd[sub 2]O[sub 3]/Si (111) crystalline template
O. Mauguin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2010
View PDFchevron_right
Si epitaxial growth on SiH3CH3 reacted Ge(1 0 0) and intermixing between Si and Ge during heat treatment
Masao Sakuraba
Applied Surface Science, 2003
View PDFchevron_right
Defects reduction of Ge epitaxial film in a germanium-on-insulator wafer by annealing in oxygen ambient
Eugene Fitzgerald
APL Materials, 2015
View PDFchevron_right
Ge films grown on Si substrates by molecular-beam epitaxy below 450 °C
O. Hul'ko
Journal of Applied Physics, 2004
View PDFchevron_right
Sputter Epitaxial Growth of Flat Germanium Film with Low Threading-Dislocation Density on Silicon (001)
Wenchang Yeh
ECS Journal of Solid State Science and Technology, 2014
View PDFchevron_right
Morphological Transformation of a Germanium Layer Grown on a Silicon Surface by Molecular-Beam Epitaxy at Low Temperatures
Nikolai Sobolev
Physics of the Solid State, 2005
View PDFchevron_right
Kinetics of selective epitaxial growth of Si and relaxed Ge by ultrahigh vacuum chemical vapor deposition in Si(001) windows
M. Halbwax
Materials Science in Semiconductor Processing, 2006
View PDFchevron_right
STM studies of GeSi thin layers epitaxially grown on Si(111)
A. Sgarlata
Applied Surface Science, 1996
View PDFchevron_right
Epitaxial growth of Si1−xGex alloys and Ge on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition without substrate heating
Masao Sakuraba
Thin Solid Films, 2014
View PDFchevron_right
High Ge content SGOI substrates obtained by the Ge condensation technique: A template for growth of strained epitaxial Ge
Abdallah Moussa
Thin Solid Films, 2008
View PDFchevron_right
Growth of Si[sub 1−x]Gesub x on Si(011)16×2 by gas-source molecular beam epitaxy: Growth kinetics, Ge incorporation, and surface phase transitions
Patrick Desjardins
Journal of Applied Physics, 1999
View PDFchevron_right
Low Temperature Germanium Growth on Silicon Oxide Using Boron Seed Layer and In Situ Dopant Activation
Duygu Kuzum
Journal of The Electrochemical Society, 2010
View PDFchevron_right
$\hbox{Al}_{2}\hbox{O}_{3}$ Interface Engineering of Germanium Epitaxial Layer Grown Directly on Silicon
Lee Kwang Hong
IEEE Transactions on Electron Devices, 2013
View PDFchevron_right
Surface segregation and growth-mode transitions during the initial stages of Si growth on Ge(001)2Xl by cyclic gas-source molecular beam epitaxy from S&H6
Raphael Tsu
View PDFchevron_right
Surface segregation and growth-mode transitions during the initial stages of Si growth on Ge(001)2×1 by cyclic gas-source molecular beam epitaxy from Si2H6
Raphael Tsu
Journal of Applied Physics, 1994
View PDFchevron_right
Structural properties of relaxed thin film germanium layers grown by low temperature RF-PECVD epitaxy on Si and Ge (100) substrates
Pere roca i cabarrocas
AIP Advances, 2014
View PDFchevron_right
Growth of silicon based germanium tin alloys
Nelly Burle
Thin Solid Films, 2012
View PDFchevron_right
Impact of the H2 anneal on the structural and optical properties of thin and thick Ge layers on Si; Low temperature surface passivation of Ge by Si
Alexandra Abbadie
Journal of Crystal Growth, 2010
View PDFchevron_right
Study of silicon–germanium interdiffusion from pure germanium deposited layers
Emmanuel Scheid
Materials Science and Engineering: B, 2008
View PDFchevron_right