Fabrication of MOS - Compatible Ion - Sensitive Devices for Water Pollution Monitoring (Warmer) (original) (raw)

2007 14th International Conference on Mixed Design of Integrated Circuits and Systems, 2007

Abstract

Preparation of pH-sensors and structures ready for ion-sensitive coating for in-line water pollution monitoring was the aim of the paper. Au and AgCl electrodes with Au backside contacts were developed using mono-Si substrates. Sequence of manufacturing process was presented. Device series resistance and potentiometric response were positively tested. ISFET pH sensors were manufactured and fully characterized. They were suitable for

Elzbieta Malinowska hasn't uploaded this paper.

Let Elzbieta know you want this paper to be uploaded.

Ask for this paper to be uploaded.