A Passive Microfluidic Valve using Superhydrophobic/Hydrophilic Nanostructures for Lab-on-A-Chip (LOC) Systems (original) (raw)

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007

Abstract

This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surface in one of the channels to selectively inhibit the flow of water based reagents and pass aqueous solutions containing surfactants. The microchannels were fabricated by standard photolithography and wet etching techniques. The superhydrophobic polymer patch was fabricated using the layer-by-layer (LBL) deposition technique, in which multiple layers

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