Nanowire hydrogen gas sensor employing CMOS micro-hotplate (original) (raw)

Selective hydrogen gas nanosensor using individual ZnO nanowire with fast response at room temperature

Sensors and Actuators B-chemical, 2010

In this work, we report on a single ZnO nanowire-based nanoscale sensor fabricated using focused ion beam (FIB/SEM) instrument. We studied the diameter dependence of the gas response and selectivity of ZnO nanowires (NWs) synthesized by chemical vapor phase growth method. The photoluminescence (PL) measurements were used to determine the deep levels related to defects which are presented in the

Novel design and characterisation of SOI CMOS micro-hotplates for gas sensors

2006

This paper describes the design and characterisation of a new generation of fully CMOS compatible novel micro-hotplates for gas sensors. The micro-hotplates employ advanced MOSFET heaters embedded in an SOI membrane. The heaters can operate at a ground-breaking temperature of over 400°C with ultra low power consumption (under 15 mW in continuous operation). Electronic circuits for drive and readout have also been designed and integrated with gas sensors.