Design and fabrication of arrays of nanoelectromechanical resonators for parallel detection of biomolecular interactions (original) (raw)

ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597), 2001

Abstract

... being achieved at the expense of the junction depth since the transient enhanced diffusion causes ... E. Cocheteau, C.Bergaud, B. Belier, L. Bary, R. Plana, << Formation of ultra-shallow ])+In junctions ... JA Harley and TW Kenny, “l/f noise considerations for the design and process ...

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