RF SOI CMOS technology on commercial trap-rich high resistivity SOI wafer (original) (raw)

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RF SOI CMOS technology on commercial trap-rich high resistivity SOI wafer

2012 IEEE International SOI Conference (SOI), 2012

Cesar Roda NeveCesar Roda Neve

Abstract

ABSTRACT In this paper we aim at comparing the static and RF performances of passive and active fully-depleted (FD) SOI MOSFETs fabricated on top of either a standard or a trap-rich HR-SOI UNIBOND wafer both provided by SOITEC.

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