RF SOI CMOS technology on commercial trap-rich high resistivity SOI wafer (original) (raw)
RF SOI CMOS technology on commercial trap-rich high resistivity SOI wafer
2012 IEEE International SOI Conference (SOI), 2012
Abstract
ABSTRACT In this paper we aim at comparing the static and RF performances of passive and active fully-depleted (FD) SOI MOSFETs fabricated on top of either a standard or a trap-rich HR-SOI UNIBOND wafer both provided by SOITEC.
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