Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices (original) (raw)
2003, Sensors and Actuators B: Chemical
Monolithic elastomer membrane valves and diaphragm pumps suitable for large-scale integration into glass micro¯uidic analysis devices are fabricated and characterized. Valves and pumps are fabricated by sandwiching an elastomer membrane between etched glass uidic channel and manifold wafers. A three-layer valve and pump design features simple non-thermal device bonding and a hybrid glass-PDMS¯uidic channel; a four-layer structure includes a glass¯uidic system with minimal¯uid-elastomer contact for improved chemical and biochemical compatibility. The pneumatically actuated valves have <10 nl dead volumes, can be fabricated in dense arrays, and can be addressed in parallel via an integrated manifold. The membrane valves provide¯ow rates up to 380 nl/s at 30 kPa driving pressure and seal reliably against¯uid pressures as high as 75 kPa. The diaphragm pumps are self-priming, pump from a few nanoliters to a few microliters per cycle at overall rates from 1 to over 100 nl/s, and can reliably pump against 42 kPa pressure heads. These valves and pumps provide a facile and reliable integrated technology for¯uid manipulation in complex glass micro¯uidic and electrophoretic analysis devices. #
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